2006•Journal of the Korean Institute of Electrical and Electronic Material EngineersRequires access

Fabrication of Micromachined On-chip High Ratio Air Core Solenoid Inductor

Jeong‐Bong Lee

Abstract

We present high aspect ratio air-core solenoid inductors with $100{\mu}m\;and\;200{\mu}m$ tall via structures on Pyrex wafer. The effect of various parameters such as different number of turns, via heights, pitch distance between turns on inductor's radio frequency (RF) characteristics have been studied. The highest Q factor we obtained from various solenoid inductors is 72.8 at 9.7 GHz, which was produced by a 3-turn inductor.

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Key concepts: Inductor, Solenoid, Fabrication, Wafer, Q factor, Materials science, Core (optical fiber), Surface micromachining