Contamination Effects of Getter Ion and Titanium Sublimation Pumped Systems on Optical Surfaces

Previous studies have indicated that ultraclean vacuum can be produced when titanium sublimation pumps are used in conjunction with getter-ion pumps. Experiments are described in which the degrees of cleanliness of a typical getter-ion, titanium sublimation-pumped system were monitored by measuring the effects of surface contamination on the reflectance of evaporated vacuum ultraviolet mirrors. Results are presented which indicate that severe reflectance losses occurred when startup of a getter-ion pump was initiated at too high a chamber pressure. Significant reflectance losses also occurred as a result of titanium sublimation-pump operation. These data are reviewed and recommendations for improved system performance are presented.