Pumping Characteristics and Application of Getter-ion Pump
Koji Kawasaki, Toshio Sugita, Tadao Nakatani, Tatsuo Asamaki
Abstract
Open-access reader
Koji Kawasaki, Toshio Sugita, Tadao Nakatani, Tatsuo Asamaki
Abstract
Open-access reader
With the advent of getter-ion pumps, it seems worthwhile to examine its pumping behaviour and effect on the residual gases within glass-metal vacuum system.A titanium getter-ion pump similar to the cold cathode “VacIon” type developed by Hall and the ultra-high vacuum mass spectrometer designed for the study of surface phenomena in ultra-high vacuum were chosen for this purpose.Some pumping characteristics of a getter-ion pump and vacuum phenomena in bakeable glass-metal lsystam evacuated by getter-ion pump at various baking conditions have been investigated.
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With the advent of getter-ion pumps, it seems worthwhile to examine its pumping behaviour and effect on the residual gases within glass-metal vacuum system.A titanium getter-ion pump similar to the cold cathode “VacIon” type developed by Hall and the ultra-high vacuum mass spectrometer designed for the study of surface phenomena in ultra-high vacuum were chosen for this purpose.Some pumping characteristics of a getter-ion pump and vacuum phenomena in bakeable glass-metal lsystam evacuated by getter-ion pump at various baking conditions have been investigated.
Key concepts: Getter, Ion pump, Materials science, Residual gas analyzer, Ultra-high vacuum, Ion, Vacuum chamber, Titanium