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2022•Unpublished venueRequires access

Introduction to MEMS and RF-MEMS: from the early days of microsystems to modern RF-MEMS passives

Jacopo Iannacci

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Key concepts: Microelectromechanical systems, Microsystem, Materials science, Nanotechnology

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Introduction to MEMS and RF-MEMS: from the early days of microsystems to modern RF-MEMS passives — Research Paper | ScholarLens