MOEMS and MEMS ‐ Technology, Benefits & Uses

Micro-electromechanical systems (MEMS) are microscopic devices combining electrical functionality and mechanical motion. Typically fabricated in high numbers on a large common substrate, MEMS exhibit the most advanced level of integration in microsystem technology. Furthermore, MEMS devices reach extraordinary precision, reproducibility and long-term reliability. Since their invention, MEMS have aimed to miniaturize sensor and actuator systems to a formerly unknown level. Optical MEMS and MOEMS (micro-opto-electromechanical systems) combine motion and optically active areas to achieve extended optical functions, like the deflection of light. Spectroscopy also benefits from the possibilities of MEMS. Using optical MEMS components, numerous types of spectroscopic systems have been realized so far, including grating-based monochromators, Fourier transform spectrometers, and Fabry–Perot interferometers. Common to all of these is the small outline of the MEMS-based systems, which supports the realization of portable spectroscopy.