Scanning Device Combined with Conventional Electron Microscope

Most of substances - organisms as well as crystals — consist of many micro-structures. It is important, in observation, separately to detect information on microareas of the specimen. In this respect, if the capabilities of the scanning electron microscope, such as the ability to detect information with regard to x-rays, secondary electrons, back scatterd electrons, transmitted electrons, and photons, are combined with those of conventional electron microscope, the resultant electron microscope may well be regarded as a new analytical instrument. With the JEM-100 type electron microscope combined with a scanning device, secondary electron images and transmitted scanning images were obtained. The incident electron probe used in the present scanning device was strongly demagnified by the prefield of the objective lens. In the objective plane the probe size of 30A was obtained.