Compact phase-only spatial light modulator with pixel pitch of 4.25 μm and high photostability

We developed compact phase-only spatial light modulator (SLM) having 1920 × 1080 pixels with pixel pitch of 4.25 μm on the basis of liquid crystal on silicon (LCOS) technologies. Our SLM can downsize optical systems on various applications because of the compactness of the panel and wide diffraction angle realized by the small pixel pitch. In addition, we realized high photostability by using inorganic alignment layers and light shielding layers for transistors. SLMs for visible light and infrared light are developed assuming display applications and industrial applications, respectively. In this paper, we will introduce our LCOS technologies used in the prototype of phase-only SLM and application researches such as illuminator and laser soldering.