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2021•Microelectronic EngineeringRequires access

Fabrication of high frequency SAW devices using tri-layer lift-off photolithography

Liam Kelly, Howard Northfield, Sabaa Rashid, Xiaoyi Bao, Pierre Berini

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Key concepts: Photolithography, Fabrication, Photoresist, Materials science, Surface acoustic wave, Lithography, Optoelectronics, Resist

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