2021Unpublished venueOpen access

Characterization of electrical and mechanical coupling in MEMS gyroscopes with electrical measurements

Margot Morlans, Jean Guérard, Jérôme Juillard

Open full text 5 citations

Abstract

We propose an intuitive way to characterize the parasitic couplings in a weakly-coupled resonator. Here the study is focused on MEMS gyroscopes, one example of coupled resonator. Knowing the value of electrical and mechanical coupling will then allow us to electronically cancel them, and thus to reduce the bias instability of the gyroscope measures.

About this research paper

What this paper is about

We propose an intuitive way to characterize the parasitic couplings in a weakly-coupled resonator. Here the study is focused on MEMS gyroscopes, one example of coupled resonator. Knowing the value of electrical and mechanical coupling will then allow us to electronically cancel them, and thus to reduce the bias instability of the gyroscope measures.

Why it matters

OpenAlex reports 5 citations for this work. Citation counts describe recorded attention and do not establish research quality.

Key contribution

A contribution statement is not available in the OpenAlex record.

Method / approach

Method details are not available in the OpenAlex metadata.

Main findings

Findings are not separately available in the OpenAlex metadata.

Limitations

Limitations are not available in the OpenAlex metadata.

Applications

Application details are not available in the OpenAlex metadata.

Available abstract

We propose an intuitive way to characterize the parasitic couplings in a weakly-coupled resonator. Here the study is focused on MEMS gyroscopes, one example of coupled resonator. Knowing the value of electrical and mechanical coupling will then allow us to electronically cancel them, and thus to reduce the bias instability of the gyroscope measures.

Key concepts: Gyroscope, Resonator, Microelectromechanical systems, Vibrating structure gyroscope, Coupling (piping), Electrical engineering, Physics, Electronic engineering

Related papers

Back to paper searchBrowse research topicsOriginal source
Characterization of electrical and mechanical coupling in MEMS gyroscopes with electrical measurements — Research Paper | ScholarLens