Characterization of electrical and mechanical coupling in MEMS gyroscopes with electrical measurements
Margot Morlans, Jean Guérard, Jérôme Juillard
Abstract
Margot Morlans, Jean Guérard, Jérôme Juillard
Abstract
We propose an intuitive way to characterize the parasitic couplings in a weakly-coupled resonator. Here the study is focused on MEMS gyroscopes, one example of coupled resonator. Knowing the value of electrical and mechanical coupling will then allow us to electronically cancel them, and thus to reduce the bias instability of the gyroscope measures.
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We propose an intuitive way to characterize the parasitic couplings in a weakly-coupled resonator. Here the study is focused on MEMS gyroscopes, one example of coupled resonator. Knowing the value of electrical and mechanical coupling will then allow us to electronically cancel them, and thus to reduce the bias instability of the gyroscope measures.
Key concepts: Gyroscope, Resonator, Microelectromechanical systems, Vibrating structure gyroscope, Coupling (piping), Electrical engineering, Physics, Electronic engineering