2012•Applied Mechanics and MaterialsOpen access

Research on Stochastic Modeling of MEMS Gyroscope

Ya Fei Ren, Xu Can Bai, Yun Wang Ge

Abstract

The majority of MEMS based gyroscopes currently under development operates in a vibratory mode and measures the angular rate instead of the absolute angle. The paper aims to establish the system dynamics models of the typical MEMS Gyro: Vibration Micro-gyroscope and analyzes the dynamic features. With different precision MEMS Gyros as the example, the detailed Times-series analysis are made of AR (6) and ARMA (2, 1) models, the impact of considering the estimation effective and the precision improved

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Available abstract

Key concepts: Vibrating structure gyroscope, Gyroscope, Microelectromechanical systems, Vibration, Control theory (sociology), Series (stratigraphy), Dynamics (music), Engineering