Experimental Study on Ion Beam Emittance of ECR Ion Source

With a recently developed electronic-sweep scanner system, we have done series of emittance study on ECR ion source. The electric-sweep scanner system was installed on the beam line of Lanzhou Electron Cyclotron Resonance Ion Source No. 3 experimental platform of Institute of Modern Physics. The influences of magnetic field, microwave, gas mixing and biased disc on the extracted ion beam emittance have been studied in detail. With the experimental results obtained and the empirical results of ion beam emittance and ECR plasma, some conclusions on the relationship between the source tunable parameters and electron cyclotron resonance plasma are made out, which might help understand the working regime of an ECR ion source. The typical results of the experiments and the derived conclusions are presented in this paper.