2020•Applied Surface ScienceRequires access

Effect of etching time in hydrofluoric acid on the structure and morphology of n-type porous silicon

Martin Kopáni, Milan Mikula, Daniel Kosnáč, Jaroslav Kováč, Michal Trnka, Ján Greguš, Monika Jerigová, Matej Jergel, Erik Vavrinský, Silvia Bačová, Peter Zitto, Štefan Polák, Emil Pinčík

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Key concepts: Hydrofluoric acid, Etching (microfabrication), Dissolution, Porous silicon, Materials science, Morphology (biology), Silicon, Surface finish

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Effect of etching time in hydrofluoric acid on the structure and morphology of n-type porous silicon — Research Paper | ScholarLens