2014•Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIERequires access
The research on conformal acid etching process of glass ceramic
Kepeng Wang, Peiji Guo
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Abstract
A series of experiments have been done to explore the effect of different conditions on the hydrofluoric acid etching. The hydrofluoric acid was used to etch the glass ceramic called “ZERODUR”, which is invented by SCHOTT in Germany. The glass ceramic was processed into cylindrical samples. The hydrofluoric acid etching was done in a plastic beaker. The concentration of hydrofluoric acid and the etching time were changed to measure the changes of geometric tolerance and I observed the surface using a microscope in order to find an appropriate condition of hydrofluoric acid etching.