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Electrical Properties of Deposited Silicon-Dioxide Films and Effect of Rapid Thermal Annealing on such Properties.

Joseph Z. Xie

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Key concepts: Annealing (glass), Silicon dioxide, Materials science, Silicon, Thermal, Optoelectronics, Metallurgy, Thermodynamics

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Electrical Properties of Deposited Silicon-Dioxide Films and Effect of Rapid Thermal Annealing on such Properties. — Research Paper | ScholarLens