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Deposition of Silicon-Based Dielectrics by Remote Plasma-Enhanced Chemical Vapor Deposition.

D. V. Tsu

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Key concepts: Deposition (geology), Chemical vapor deposition, Materials science, Plasma-enhanced chemical vapor deposition, Silicon, Dielectric, Plasma, Plasma processing

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Deposition of Silicon-Based Dielectrics by Remote Plasma-Enhanced Chemical Vapor Deposition. — Research Paper | ScholarLens