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Low-Energy Ion-Surface Interaction and Epitaxial Growth in the Silicon-Germanium System

Cho-Jen Tsai

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Key concepts: Germanium, Silicon, Epitaxy, Materials science, Engineering physics, Surface (topology), Energy (signal processing), Optoelectronics

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Low-Energy Ion-Surface Interaction and Epitaxial Growth in the Silicon-Germanium System — Research Paper | ScholarLens