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Mechanisms and kinetics of silicon atomic-layer epitaxy on silicon(001)2x1 and germanium(001)2x1

Robert Tsu

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Key concepts: Silicon, Germanium, Layer (electronics), Kinetics, Epitaxy, Materials science, Optoelectronics, Nanotechnology

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Mechanisms and kinetics of silicon atomic-layer epitaxy on silicon(001)2x1 and germanium(001)2x1 — Research Paper | ScholarLens