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The Effects of Reactive Ion Etching on the Electronic Properties of Silicon Surfaces and Power Devices.

Tsengyou Syau

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Key concepts: Silicon, Etching (microfabrication), Reactive-ion etching, Materials science, Ion, Engineering physics, Optoelectronics, Nanotechnology

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The Effects of Reactive Ion Etching on the Electronic Properties of Silicon Surfaces and Power Devices. — Research Paper | ScholarLens