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1995•DSpace@MIT (Massachusetts Institute of Technology)Open access

Deposition and characterization of silicon-germanium alloy thin films on oxide

Julie A. Tsai

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Abstract

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1995.

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Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1995.

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Available abstract

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1995.

Key concepts: Germanium, Materials science, Characterization (materials science), Alloy, Deposition (geology), Silicon, Silicon-germanium, Thin film

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