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Surface Modeling of Thin Film Growth: a Study of Silicon Oxide Deposition from Tetraethoxysilane and Silicon Deposition from Disilane on the SILICON(100) Surface

Hee-Chuen Cho

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Key concepts: Disilane, Silicon, Deposition (geology), Silicon oxide, Materials science, Thin film, LOCOS, Nanocrystalline silicon

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Surface Modeling of Thin Film Growth: a Study of Silicon Oxide Deposition from Tetraethoxysilane and Silicon Deposition from Disilane on the SILICON(100) Surface — Research Paper | ScholarLens