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Application of EPMA in Analysis of Precipitate and Inclusion

Junliang Liu

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Abstract

The electron probe micro-analysis(EPMA) puts highly focused electron beam on the sample exciting the characteristic X-ray from a spot on the sample.By measuring the wavelength and intensity of the x-ray,most element quality and quantity analysis can be made,except H,He,Li and Be.The EPMA is a powerful instrument to research micostructure because it can do second electron map and element map simultaneously to analyze the nonuniformity of the material.The Analysis of the precipitate and inclusion by using the EPMA was described and discussed in this paper.After a comparison of EPMA with other microbeam analyzers,the method of EPMA was summarized.

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What this paper is about

The electron probe micro-analysis(EPMA) puts highly focused electron beam on the sample exciting the characteristic X-ray from a spot on the sample.By measuring the wavelength and intensity of the x-ray,most element quality and quantity analysis can be made,except H,He,Li and Be.The EPMA is a powerful instrument to research micostructure because it can do second electron map and element map simultaneously to analyze the nonuniformity of the material.The Analysis of the precipitate and inclusion by using the EPMA was described and discussed in this paper.After a comparison of EPMA with other microbeam analyzers,the method of EPMA was summarized.

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Available abstract

The electron probe micro-analysis(EPMA) puts highly focused electron beam on the sample exciting the characteristic X-ray from a spot on the sample.By measuring the wavelength and intensity of the x-ray,most element quality and quantity analysis can be made,except H,He,Li and Be.The EPMA is a powerful instrument to research micostructure because it can do second electron map and element map simultaneously to analyze the nonuniformity of the material.The Analysis of the precipitate and inclusion by using the EPMA was described and discussed in this paper.After a comparison of EPMA with other microbeam analyzers,the method of EPMA was summarized.

Key concepts: Electron microprobe, Microbeam, Analytical Chemistry (journal), Inclusion (mineral), Materials science, Microprobe, Electron probe microanalysis, Cathode ray

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