2018•Bulletin of the American Physical SocietyRequires access

Thermal Conductivity of amorphous and nanocrystalline silicon films prepared by hot-wire chemical-vapor deposition*

Xiao Liu, Battogtokh Jugdersuren, Brian T. Kearney, Daniel Queen, Thomas Metcalf, James C. Culbertson, Paul A. DeSario, R. M. Stroud, William Nemeth, Qi Wang

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Key concepts: Materials science, Chemical vapor deposition, Nanocrystalline material, Nanocrystalline silicon, Amorphous solid, Amorphous silicon, Chemical engineering, Thermal conductivity

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Thermal Conductivity of amorphous and nanocrystalline silicon films prepared by hot-wire chemical-vapor deposition* — Research Paper | ScholarLens