2016•Bulletin of the American Physical SocietyRequires access

Thermal Conductivity of Nanocrystalline Silicon Prepared by Plasma-Enhanced Chemical-Vapor Deposition

Battogtokh Jugdersuren, Xiao Liu, Brian T. Kearney, Daniel Queen, Thomas Metcalf, James C. Culbertson, Christopher N. Chervin, Michael B. Katz, R. M. Stroud

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Key concepts: Materials science, Chemical vapor deposition, Nanocrystalline material, Plasma-enhanced chemical vapor deposition, Nanocrystalline silicon, Thermal conductivity, Chemical engineering, Silicon

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Thermal Conductivity of Nanocrystalline Silicon Prepared by Plasma-Enhanced Chemical-Vapor Deposition — Research Paper | ScholarLens