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1987•Advances in X-ray AnalysisRequires access

A Scanning X-Ray Fluorescence Microprobe with Synchrotron Radiation

Y. Gohshj, S. Aoki, Atsuo Iida, Shinjiro Hayakawa, H. Yamaji, Kenji Sakurai

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Abstract

Summary A scantling X-ray fluorescence(XRF) microprobe using WoIter type 1 optics was developed, and micro and trace element analysis was carried out using synchrotron radiation up to 10 keV as an excitation source. The design parameters of the optical system and the performance of the system, such as the beam size and the intensity, are described. The MDL obtained for Mn was 6 ppm in relative concentration and about 0.1 pg in absolute amount. The estimated spatial resolution was better than 10 um.

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What this paper is about

Summary A scantling X-ray fluorescence(XRF) microprobe using WoIter type 1 optics was developed, and micro and trace element analysis was carried out using synchrotron radiation up to 10 keV as an excitation source. The design parameters of the optical system and the performance of the system, such as the beam size and the intensity, are described. The MDL obtained for Mn was 6 ppm in relative concentration and about 0.1 pg in absolute amount. The estimated spatial resolution was better than 10 um.

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Available abstract

Summary A scantling X-ray fluorescence(XRF) microprobe using WoIter type 1 optics was developed, and micro and trace element analysis was carried out using synchrotron radiation up to 10 keV as an excitation source. The design parameters of the optical system and the performance of the system, such as the beam size and the intensity, are described. The MDL obtained for Mn was 6 ppm in relative concentration and about 0.1 pg in absolute amount. The estimated spatial resolution was better than 10 um.

Key concepts: Microprobe, Synchrotron radiation, Fluorescence, Optics, Synchrotron, X-ray fluorescence, Synchrotron Radiation Source, Resolution (logic)

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