1987•Japanese Journal of Applied PhysicsRequires access

A Scanning X-Ray Fluorescence Microprobe with Synchrotron Radiation

Yohichi Gohshi, S. Aoki, Atsuo Iida, Shinjiro Hayakawa, Hironao Yamaji, Kenji Sakurai

Abstract

A scanning X-ray fluorescence (XRF) microprobe using Wolter type 1 optics was developed, and two-dimensional XRF measurements were carried out using synchrotron radiation up to 10 keV as an excitation source. The system of this microprobe and the results of two-dimensional measurements of a resolution check pattern and rock samples are described. The estimated spatial resolution was better than 10 µm.

About this research paper

What this paper is about

Why it matters

OpenAlex reports 38 citations for this work. Citation counts describe recorded attention and do not establish research quality.

Key contribution

A contribution statement is not available in the OpenAlex record.

Method / approach

Method details are not available in the OpenAlex metadata.

Main findings

Findings are not separately available in the OpenAlex metadata.

Limitations

Limitations are not available in the OpenAlex metadata.

Applications

Application details are not available in the OpenAlex metadata.

Available abstract

Key concepts: Microprobe, Synchrotron radiation, X-ray fluorescence, Resolution (logic), Optics, Fluorescence, Synchrotron, Materials science