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2014•Unpublished venueRequires access

A novel method for increasing MEMS capacitive sensors sensitivity

Hadi Tavakoli, Ebrahim Abbaspour Sani, Yousef Valizadeh

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Abstract

One of the best detection methods for MEMS sensors is capacitance sensing method. In MEMS sensors, dimensions are reduced to microns, in such a small sizes, neglecting fringe capacitance is not reasonable, because fringe capacitance increases up to 75 percent of the total capacitance [1]. In this paper a new method for determining optimum sensitivity and linearity range considering fringing capacitance is presented. Also a novel approach decreasing fringing capacitance to increase sensitivity of capacitive sensors is proposed.

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What this paper is about

One of the best detection methods for MEMS sensors is capacitance sensing method. In MEMS sensors, dimensions are reduced to microns, in such a small sizes, neglecting fringe capacitance is not reasonable, because fringe capacitance increases up to 75 percent of the total capacitance [1]. In this paper a new method for determining optimum sensitivity and linearity range considering fringing capacitance is presented. Also a novel approach decreasing fringing capacitance to increase sensitivity of capacitive sensors is proposed.

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Available abstract

One of the best detection methods for MEMS sensors is capacitance sensing method. In MEMS sensors, dimensions are reduced to microns, in such a small sizes, neglecting fringe capacitance is not reasonable, because fringe capacitance increases up to 75 percent of the total capacitance [1]. In this paper a new method for determining optimum sensitivity and linearity range considering fringing capacitance is presented. Also a novel approach decreasing fringing capacitance to increase sensitivity of capacitive sensors is proposed.

Key concepts: Capacitance, Capacitive sensing, Microelectromechanical systems, Sensitivity (control systems), Linearity, Materials science, Parasitic capacitance, Differential capacitance

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