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2018•Unpublished venueRequires access

Vibrational Energy Loss Analysis of a MEMS Disk Resonator Gyroscope

Jianbing Xie, Yang Jin, Jinqiu Zhou

Open publisher page 2 citations

Abstract

In this paper, we design and fabricated a low vibrational energy loss MEMS Disk Resonator Gyroscope. For the conventional turning fork micromachined gyroscope, the anchor loss is the primary form of energy loss, but for the MEMS Disk Resonator Gyroscope, the anchor loss can be ignored because of its center supported structure. The simulated quality factors of thermoelastic damping and anchor loss of the designed MEMS Disk Resonator Gyroscope are 65,937 and 17,154,000, respectively, and the maximum quality factors of the fabricated MEMS Disk Resonator Gyroscope is 65,884. So we can conclusion that, the energy loss of the designed MEMS Disk Resonator Gyroscope comes mainly from thermoelastic damping.

About this research paper

What this paper is about

In this paper, we design and fabricated a low vibrational energy loss MEMS Disk Resonator Gyroscope. For the conventional turning fork micromachined gyroscope, the anchor loss is the primary form of energy loss, but for the MEMS Disk Resonator Gyroscope, the anchor loss can be ignored because of its center supported structure. The simulated quality factors of thermoelastic damping and anchor loss of the designed MEMS Disk Resonator Gyroscope are 65,937 and 17,154,000, respectively, and the maximum quality factors of the fabricated MEMS Disk Resonator Gyroscope is 65,884. So we can conclusion that, the energy loss of the designed MEMS Disk Resonator Gyroscope comes mainly from thermoelastic damping.

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Available abstract

In this paper, we design and fabricated a low vibrational energy loss MEMS Disk Resonator Gyroscope. For the conventional turning fork micromachined gyroscope, the anchor loss is the primary form of energy loss, but for the MEMS Disk Resonator Gyroscope, the anchor loss can be ignored because of its center supported structure. The simulated quality factors of thermoelastic damping and anchor loss of the designed MEMS Disk Resonator Gyroscope are 65,937 and 17,154,000, respectively, and the maximum quality factors of the fabricated MEMS Disk Resonator Gyroscope is 65,884. So we can conclusion that, the energy loss of the designed MEMS Disk Resonator Gyroscope comes mainly from thermoelastic damping.

Key concepts: Gyroscope, Resonator, Thermoelastic damping, Tuning fork, Vibrating structure gyroscope, Microelectromechanical systems, Insertion loss, Materials science

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