1987•Unpublished venueOpen access

On the current intensity limit of a vacuum arc ion source

I.G. Brown

Open full text 0 citations

Abstract

The maximum ion current that can be produced as a high energy beam from a metal vapor vacuum arc ion source is considered. Results are presented of measurements of the plasma ion current in the MEVVA II ion source. It is shown that this source is an efficient generator of metal ions, an intense flux of which is efficiently transported to the beam extractor. The maximum metal ion current that is available for extraction at the extractor location is 5% of the arc current. The limitation to the intensity of the metal ion beam that can be produced by this kind of ion source is in the extractor design. 27 refs., 6 figs.

Open-access reader

About this research paper

What this paper is about

The maximum ion current that can be produced as a high energy beam from a metal vapor vacuum arc ion source is considered. Results are presented of measurements of the plasma ion current in the MEVVA II ion source. It is shown that this source is an efficient generator of metal ions, an intense flux of which is efficiently transported to the beam extractor. The maximum metal ion current that is available for extraction at the extractor location is 5% of the arc current. The limitation to the intensity of the metal ion beam that can be produced by this kind of ion source is in the extractor design. 27 refs., 6 figs.

Why it matters

A significance statement is not available in the OpenAlex record.

Key contribution

A contribution statement is not available in the OpenAlex record.

Method / approach

Method details are not available in the OpenAlex metadata.

Main findings

Findings are not separately available in the OpenAlex metadata.

Limitations

Limitations are not available in the OpenAlex metadata.

Applications

Application details are not available in the OpenAlex metadata.

Available abstract

The maximum ion current that can be produced as a high energy beam from a metal vapor vacuum arc ion source is considered. Results are presented of measurements of the plasma ion current in the MEVVA II ion source. It is shown that this source is an efficient generator of metal ions, an intense flux of which is efficiently transported to the beam extractor. The maximum metal ion current that is available for extraction at the extractor location is 5% of the arc current. The limitation to the intensity of the metal ion beam that can be produced by this kind of ion source is in the extractor design. 27 refs., 6 figs.

Key concepts: Ion source, Vacuum arc, Ion beam deposition, Current (fluid), Ion, Ion current, Ion gun, Ion beam

Related papers

Back to paper searchBrowse research topicsOriginal source
On the current intensity limit of a vacuum arc ion source — Research Paper | ScholarLens