2017•Scripta MaterialiaRequires access

Industrial application of atom probe tomography to semiconductor devices

A. Devin Giddings, Sebastian Koelling, Yasuo Shimizu, Robert Estivill, Koji Inoue, Wilfried Vandervorst, Wai Kong Yeoh

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Key concepts: Semiconductor industry, Atom probe, Semiconductor, Metrology, Materials science, Semiconductor device fabrication, Semiconductor device, Nanotechnology

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Industrial application of atom probe tomography to semiconductor devices — Research Paper | ScholarLens