Isabelle Martin, Robert Estivill, M. Juhel, Adeline Grenier, Ty J. Prosa, David J. Larson
Abstract
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Isabelle Martin, Robert Estivill, Marc Juhel, Adeline Grenier, Ty J Prosa, David J Larson; Atomic Scale Analysis of Dopants in CMOS Structures by Atom Prob
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Isabelle Martin, Robert Estivill, Marc Juhel, Adeline Grenier, Ty J Prosa, David J Larson; Atomic Scale Analysis of Dopants in CMOS Structures by Atom Prob
Key concepts: Atom probe, Dopant, Atomic units, Materials science, Atom (system on chip), CMOS, Scale (ratio), Optoelectronics