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2015•Proceedings of International Conference on Leading Edge Manufacturing in 21st century LEM21Open access

1211 Development of Novel Computer Generated Hologram (CGH) for Short Pulse Laser Processing of Precise Micro Pattern Using Spatial Light Modulator

Kyoshi INOUE, Takumi Sato, Fumihiro ITOIGAWA, Singo Ono, Takashi Nakamura

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Abstract

Complex micro- and nano-structure can be formed simply by generating complex electric fields holographically with a spatial light modulator (SLM) by liquid crystal on silicon (LCOS) technology. Processing patterns for micro-patterns to be desired are commonly generated by computer generated hologram (CGH). In this study, to realize the more precise micro-processing with highly flexible pattern by use of the LCOS-SLM, a novel CGH algorithm suitable to micrometer order processing is developed, into which the principle of a phase shift mask is applied. From the results of processing experiments to form micro holes and longitudinal ridges, the novel algorithm can provide more precise processing.

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Complex micro- and nano-structure can be formed simply by generating complex electric fields holographically with a spatial light modulator (SLM) by liquid crystal on silicon (LCOS) technology. Processing patterns for micro-patterns to be desired are commonly generated by computer generated hologram (CGH). In this study, to realize the more precise micro-processing with highly flexible pattern by use of the LCOS-SLM, a novel CGH algorithm suitable to micrometer order processing is developed, into which the principle of a phase shift mask is applied. From the results of processing experiments to form micro holes and longitudinal ridges, the novel algorithm can provide more precise processing.

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Available abstract

Complex micro- and nano-structure can be formed simply by generating complex electric fields holographically with a spatial light modulator (SLM) by liquid crystal on silicon (LCOS) technology. Processing patterns for micro-patterns to be desired are commonly generated by computer generated hologram (CGH). In this study, to realize the more precise micro-processing with highly flexible pattern by use of the LCOS-SLM, a novel CGH algorithm suitable to micrometer order processing is developed, into which the principle of a phase shift mask is applied. From the results of processing experiments to form micro holes and longitudinal ridges, the novel algorithm can provide more precise processing.

Key concepts: Liquid crystal on silicon, Spatial light modulator, Holography, Computer-generated holography, Computer science, Materials science, Optics, Liquid-crystal display

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1211 Development of Novel Computer Generated Hologram (CGH) for Short Pulse Laser Processing of Precise Micro Pattern Using Spatial Light Modulator — Research Paper | ScholarLens