2004•The Proceedings of Ibaraki District ConferenceOpen access

Development of Bio-Microdevice Actuated by Piezoelectric Thin Film for Cell Culture

Yoshiyuki Makita, Takayuki Shibata, Toru Masuzawa, Akio Kishida, Eiji Makino

Abstract

In order to develop a bio-microdevice actuated by piezoelectric thin film for cell culture, we fabricated lead zirconate titanate (PZT) thin film to be used as an actuator and characterized its crystallographic structure by X-ray diffraction analysis. The PZT thin film was fabricated by a sol-gel method using a precursor solution with excess lead content. When pyrolysis at 300℃ for 10 min and then annealed at 600℃ for 1 min in air, PZT thin films with (111) orientation were obtained. In addition, PZT thin films before annealed were successfully patterned in a HCl solution using a positive thick photoresist as an etching mask.

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Key concepts: Materials science, Thin film, Photoresist, Piezoelectricity, Lead zirconate titanate, Diffraction, Composite material, Actuator