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2017•CIRP AnnalsRequires access

Nanomanufacturing—Perspective and applications

Fengzhou Fang, X. D. Zhang, Wei Gao, Y. B. Guo, Gerry Byrne, Hans Nørgaard Hansen

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Key concepts: Nanomanufacturing, Nanometrology, Nanotechnology, Computer science, Subtractive color, Key (lock), Nanolithography, Systems engineering

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