2012•Unpublished venueRequires access

Production Planning and Control for Semiconductor Wafer Fabrication Facilities: Modeling, Analysis, and Systems

John Fowler, Scott J. Mason, Lars Mönch

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Key concepts: Wafer fabrication, Wafer, Semiconductor device fabrication, Fabrication, Semiconductor, Control (management), Engineering, Manufacturing engineering

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Production Planning and Control for Semiconductor Wafer Fabrication Facilities: Modeling, Analysis, and Systems — Research Paper | ScholarLens