2004•IFAC Proceedings VolumesRequires access

Actuators for RF MEMS Devices

Raafat R. Mansour, D. Yan, Maher Bakri-Kassem, Mojgan Daneshmand, Neil Sarker

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Key concepts: Microelectromechanical systems, Variable capacitor, Capacitor, Inductor, Actuator, Electrical engineering, Electronic engineering, Engineering