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An improved design for parallel plate MEMS variable capacitors

Maher Bakri-Kassem, Raafat R. Mansour

Open publisher page 14 citations

Abstract

A MEMS variable capacitor having additional carrier beams is proposed. The use of the carrier beams increases the capacitor's tuning range and prevents the top plate from collapsing at a tuning range of 50%. The tuning range was measured and found to be 410% at 1 GHz with a maximum DC bias voltage of 9.2 volt. The achievable tuning range exceeds that of the traditional parallel plate MEMS variable capacitors. The proposed MEMS variable capacitor is built using the PolyMUMPs process.

About this research paper

What this paper is about

A MEMS variable capacitor having additional carrier beams is proposed. The use of the carrier beams increases the capacitor's tuning range and prevents the top plate from collapsing at a tuning range of 50%. The tuning range was measured and found to be 410% at 1 GHz with a maximum DC bias voltage of 9.2 volt. The achievable tuning range exceeds that of the traditional parallel plate MEMS variable capacitors. The proposed MEMS variable capacitor is built using the PolyMUMPs process.

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OpenAlex reports 14 citations for this work. Citation counts describe recorded attention and do not establish research quality.

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Available abstract

A MEMS variable capacitor having additional carrier beams is proposed. The use of the carrier beams increases the capacitor's tuning range and prevents the top plate from collapsing at a tuning range of 50%. The tuning range was measured and found to be 410% at 1 GHz with a maximum DC bias voltage of 9.2 volt. The achievable tuning range exceeds that of the traditional parallel plate MEMS variable capacitors. The proposed MEMS variable capacitor is built using the PolyMUMPs process.

Key concepts: Variable capacitor, Capacitor, Microelectromechanical systems, Materials science, Variable (mathematics), Range (aeronautics), Voltage, Electrical engineering

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