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Mechanisms of the Reactive Sputtering of Indium in Argon-Nitrogen and Nitrogen-Oxygen Discharges: Growth of Indium-Nitride, Indium-Oxynitride and Indium-Oxide Films

Bangalore Ramaswamiengar Natarajan

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Key concepts: Indium, Indium nitride, Sputtering, Nitride, Nitrogen, Materials science, Argon, Oxygen

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Mechanisms of the Reactive Sputtering of Indium in Argon-Nitrogen and Nitrogen-Oxygen Discharges: Growth of Indium-Nitride, Indium-Oxynitride and Indium-Oxide Films — Research Paper | ScholarLens