2017•Materials Science in Semiconductor ProcessingRequires access

Smoothening of scalloped DRIE trench walls

Zishan Ali Syed Mohammed, Olimpo M.A.S., Daniel Puiu Poenar, Sheel Aditya

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Key concepts: Deep reactive-ion etching, Trench, Materials science, Etching (microfabrication), Silicon, Electroplating, Surface finish, Optoelectronics