The effect of short beam length and gap distance on the resonance frequencies in Fishbone-shaped microelectromechanical system resonator

We investigated the effect of short beam length and gap distance between short beams on the resonance frequencies in Fishbone-shaped MEMS resonator. To do so, we fabricated three different kinds of Fishbone-shaped MEMS resonators, and measured their resonance frequencies. Moreover, we investigated the resonance frequencies by the simulation, which were compared with measurement results and they were well agreed. As a result, we could confirm that the longer short beam length or the wider gap distance between short beams gives the lower resonance frequency. Thus, by the variation of short beam lengths or gap distances between short beams, we could achieve finer tuning of the resonance frequencies in Fishbone-shaped resonator.