2011•Advanced materials researchOpen access

The Primary Processing of MEMS Devices and Applications Analysis

Kai Chen, Fang Li, Hong Kai Wang

Abstract

This paper details the system of MEMS technology, focusing on analysis MEMS device processing and application status. Through the analysis of MEMS technology in the application of MEMS devices, MEMS devices described in the application of the status in modern life, while the survey data produced a MEMS device in the next few years the proportion of market share, and analyse the developments of MEMS devices and development trend.

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Available abstract

Key concepts: Microelectromechanical systems, Engineering, Materials science, Nanotechnology