2009•Unpublished venueRequires access

RF MEMS resonators: Material properties extraction

Yasseen Nada, Steve Stoffels, H.A.C. Tilmans, Emad Hegazi, Hani Ragai, Amr M. Shaarawi

Abstract

Analytical formula for the resonance frequencies of circular, square, and hexagonal MEMS resonators are extracted based on the analytical model for extensional vibrations of MEMS resonators. Material properties for the MEMS resonators are then extracted based on the analytical formula. Experimental measurement is done to extract the material properties of single crystal silicon MEMS resonators to verify the extraction method.

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Available abstract

Key concepts: Resonator, Microelectromechanical systems, Materials science, Extraction (chemistry), Silicon, Hexagonal crystal system, Vibration, Resonance (particle physics)