Anchor loss limited Q factor analysis of disk resonator at UHF using various materials

Surface micromachined resonators and filters are attractive for various RF applications. In this paper the Quality factor (Q) of RF MEMS disk resonators using various materials at UHF frequencies is analyzed. It is found that disk resonators Q factor increases with decrease in the energy density of the material while keeping all other geometries constant. As the Q factor increases, the Sensitivity of the device is also increased. The disk resonator is simulated and anchor loss limited Q factor is found out using PML. The anchor damping is a limiting loss mechanism that determines the resonators Q factor. The Q factor of disk resonator is analyzed at different Eigen frequency values using COMSOL Multiphysics.