2015•Bulletin of Electrical Engineering and InformaticsOpen access

Characterization of Capacitive Comb-finger MEMS Accelerometers

Aaditi Joshi, Sangram Redkar, Thomas G. Sugar

Abstract

This paper discusses various methods for testing the performance of MEMS capacitive comb-finger accelerometers manufactured by Sandia National Laboratories. The use of Capacitive MEMS devices requires complex circuits for measurement of capacitance. Sandia MEMS accelerometer’s capacitance changes in a very small femto-farad (fF) range. The performance of accelerometer is tested using Analog Devices AD7747 sigma-delta capacitance to digital converter. The response of a MEMS capacitive accelerometer to various tests is useful for testing and characterization and investigate it’s suitability for various applications

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Key concepts: Accelerometer, Capacitive sensing, Microelectromechanical systems, Capacitance, Electronic engineering, Electrical engineering, Engineering, Materials science