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Epitaxial Growth of 6H-SiC by Chemical Vapor Deposition

Soichiro NISHINO, Kazuyoshi Takahashi, Y. Kojima, Junji Saraie

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Key concepts: Epitaxy, Chemical vapor deposition, Materials science, Combustion chemical vapor deposition, Engineering physics, Optoelectronics, Nanotechnology, Thin film

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Epitaxial Growth of 6H-SiC by Chemical Vapor Deposition — Research Paper | ScholarLens