Takashi Saitō, S. Ito, Akifumi Tada, Kazuaki Hotta
Abstract
Achieving extended lifetimes in discharge- excited ArF excimer lasers lias been an important issue for industrial applications. This paper reports that an ArF excimer laser with a new gas purifier, which has a long gas-life-time of more than 1 × 108 shots, was developed.
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Achieving extended lifetimes in discharge- excited ArF excimer lasers lias been an important issue for industrial applications. This paper reports that an ArF excimer laser with a new gas purifier, which has a long gas-life-time of more than 1 × 108 shots, was developed.
Key concepts: Excimer, Excited state, Excimer laser, Laser, Gas laser, Materials science, Optoelectronics, X-ray laser