1995•The Review of Laser EngineeringOpen access
Principles of Excimer Light Sources.
Mitsuo Maeda
Open full text 0 citations
Abstract
Excimer lasers and excimer lamps provided efficient and high-power UV sources for applications of laser-induced chemistry and laser processing. After the emission mechanism of excimers and the spectroscopy of excimers were briefly reviewed, excitation methods and system constructions of excimer lasers were described. Especially for discharge-pumped rare-gas halide excimer lasers, detaild description of laser system, gas treatment and simulation analysis was made.
Open-access reader