ScholarLens Back to search
2008•Dianzi xianwei xuebaoRequires access

Principle,application and development of focused ion beam system

Rongming Wang

Open publisher page 0 citations

Abstract

As a new method of micro/nano-analysis and manufacturing,focused ion beam(FIB) has unexampled virtues compared with the conventional machining-tools and thereby has important application in the fields of micro/nano manufacturing,manipulation and apparatus developments.In this paper,the configurations and principle of FIB have been introduced.The extended functions,applications and future development have also been discussed as well.

About this research paper

What this paper is about

As a new method of micro/nano-analysis and manufacturing,focused ion beam(FIB) has unexampled virtues compared with the conventional machining-tools and thereby has important application in the fields of micro/nano manufacturing,manipulation and apparatus developments.In this paper,the configurations and principle of FIB have been introduced.The extended functions,applications and future development have also been discussed as well.

Why it matters

A significance statement is not available in the OpenAlex record.

Key contribution

A contribution statement is not available in the OpenAlex record.

Method / approach

Method details are not available in the OpenAlex metadata.

Main findings

Findings are not separately available in the OpenAlex metadata.

Limitations

Limitations are not available in the OpenAlex metadata.

Applications

Application details are not available in the OpenAlex metadata.

Available abstract

As a new method of micro/nano-analysis and manufacturing,focused ion beam(FIB) has unexampled virtues compared with the conventional machining-tools and thereby has important application in the fields of micro/nano manufacturing,manipulation and apparatus developments.In this paper,the configurations and principle of FIB have been introduced.The extended functions,applications and future development have also been discussed as well.

Key concepts: Focused ion beam, Materials science, Machining, Nanotechnology, Nano-, Ion beam, Beam (structure), Computer science

Related papers

Related paper 1Related paper 2Related paper 3
Back to paper searchBrowse research topicsOriginal source
Principle,application and development of focused ion beam system — Research Paper | ScholarLens