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2005•Journal of Micromechanics and MicroengineeringRequires access

A nanofactory by focused ion beam

Toshiaki Fujii, Koji Iwasaki, Masanao Munekane, T. Takeuchi, Masakatsu Hasuda, Tatsuya Asahata, Masahiro Kiyohara, Toshiharu Kogure, Yukimitsu Kijima, Takashi Kaito

Open publisher page 32 citations

Abstract

A focused ion beam (FIB) system is process equipment used to make a wide variety of small structures of various materials by irradiating a focused gallium ion beam of nanometer-order diameter to a surface of specimens and by utilizing spattering etching and ion beam induced deposition. In order to realize greater diversity of structures with use of the FIB system, we developed a technology of making three-dimensional structures by using gas assist etching, and a precision wheel stage to be used in the focused ion beam (FIB) system. Using these technologies with the FIB system, we achieved a nano processing machine which can be called a nano milling machine or a nano lathe.

About this research paper

What this paper is about

A focused ion beam (FIB) system is process equipment used to make a wide variety of small structures of various materials by irradiating a focused gallium ion beam of nanometer-order diameter to a surface of specimens and by utilizing spattering etching and ion beam induced deposition. In order to realize greater diversity of structures with use of the FIB system, we developed a technology of making three-dimensional structures by using gas assist etching, and a precision wheel stage to be used in the focused ion beam (FIB) system. Using these technologies with the FIB system, we achieved a nano processing machine which can be called a nano milling machine or a nano lathe.

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OpenAlex reports 32 citations for this work. Citation counts describe recorded attention and do not establish research quality.

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Available abstract

A focused ion beam (FIB) system is process equipment used to make a wide variety of small structures of various materials by irradiating a focused gallium ion beam of nanometer-order diameter to a surface of specimens and by utilizing spattering etching and ion beam induced deposition. In order to realize greater diversity of structures with use of the FIB system, we developed a technology of making three-dimensional structures by using gas assist etching, and a precision wheel stage to be used in the focused ion beam (FIB) system. Using these technologies with the FIB system, we achieved a nano processing machine which can be called a nano milling machine or a nano lathe.

Key concepts: Ion beam, Focused ion beam, Beam (structure), Ion, Materials science, Optics, Physics, Quantum mechanics

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