Determination of Micro Chloride Ion in Acidic Copper Electroplating Solution by Turbidimetric

Microamounts of chloride ion in acidic copper electroplating solution was determined directly by the silver chloride turbidimetric method in the presence of the major component Cu2+ ion with glycol as solubilizing agent and silver nitrate as precipitating agent.The determination wave length is 440 nm,the linear range is 0～50 μg/25 mL,the apparent molar absorptivity is e=1.3×105,and the limit of detection is 0.035 μg/mL.The recovery of chloride ion in different levels was measured in acidic copper electroplating solution,the result is 95.4%～104.5%.Moreover,no interference was found in the presence of other familiar coexisting ion.The method is rapid,accurate and simple.