Analysis of static stiffness for a single direction translation micro-displacement stage

By applying the beam element of finite element method,an element stiffness matrix of flexure hinge which is considered as non-uniform beam is established in this paper.Based on the stiffness matrix,the finite element model of a single direction translation micro-displacement stage is presented.The characteristic of the displacement output of the micro-displacement stage is gained by the model.Meanwhile,by selecting different parameters of the flexure hinge,a comparison is made between the theoretical model and the simulation model using finite element analysis software.The results of two methods to calculate the output displacement are in good agreement,which indicates that the theoretical model is correct.